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In this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy into electricity, and presents multiple resonant modes in the frequency range of interest (i.e. below 10 kHz). The experimental characterisation of a sputter deposited aluminium nitride piezoelectric thin-film layer is reported, leading to the extraction of material properties parameters. Such values are then incorporated in the finite element method model of the EH, implemented in Ansys Workbench (TM), in order to get reasonable estimates of the converted power levels achievable by the proposed device solution. Multiphysics simulations indicate that extracted power values in the range of several mu W can be addressed by the EH-MEMS concept when subjected to mechanical vibrations up to 10 kHz, operating in closed-loop conditions (i.e. piezoelectric generator connected to a 100 k Omega resistive load). This represents an encouraging result, opening up the floor to exploitations of the proposed EH-MEMS device in the field of wireless sensor networks and zero-power sensing nodes.

Silicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed.

In this work we discuss a novel design concept of energy harvester (EH), based on Microsystem (MEMS) technology, meant to convert mechanical energy, available in the form of vibrations scattered in the surrounding environment, into electrical energy by means of the piezoelectric conversion principle. The resonant structure, named four-leaf clover (FLC), is circular and based on four petal-like double mass-spring systems, kept suspended through four straight beams anchored to the surrounding Silicon frame. Differently from standard cantilever-type EHs that typically convert energy uniquely in correspondence with the fundamental vibration frequency, this particular shape is aimed to exploit multiple resonant modes and, thereby, to increase the performance and the operation bandwidth of the MEMS device. A preliminary non-optimized design of the FLC is discussed and physical samples of the sole mechanical resonator, fabricated at the DIMES Technology Center (Delft University of Technology, the Netherlands), are experimentally characterized. Their behaviour is compared against simulations performed in ANSYS Workbench(TM), confirming good accuracy of the predictive method. Furthermore, the electromechanical multiphysical behaviour of the FLC EH is also analysed in Workbench, by adding a layer with piezoelectric conversion properties in the simulation. The measured and simulated data reported in this paper confirm that the MEMS converter exhibits multiple resonant modes in the frequency range below 1 kHz, where most of the environmental vibration energy is scattered, and extracted power levels of 0.2 ?W can be achieved as well, in closed-loop conditions. Further developments of this work are expected to fully prove the high-performance of the FLC concept, and are going to be addressed by the authors of this work in the on-going activities. © 2013 Springer-Verlag Berlin Heidelberg.