- G. Sordo; T. Kuenzig; Achim Bittner; Ulrich Schmid; Michael Schneider;
Michele Bonaldi; Michele Bonaldi
Harvested from ORCID Public Data FileMichele Bonaldi in OpenAIRE Enrico Serra; Enrico Serra;Enrico Serra
Harvested from ORCID Public Data FileEnrico Serra in OpenAIRE Jacopo Iannacci; Jacopo Iannacci
Harvested from ORCID Public Data FileJacopo Iannacci in OpenAIRE Antonio Borrielli; Gabriele Schrag; Pasqualina M. Sarro;Antonio Borrielli
Harvested from ORCID Public Data FileAntonio Borrielli in OpenAIRE Gregory Pandraud; Gregory Pandraud
Harvested from ORCID Public Data FileGregory Pandraud in OpenAIREIn this contribution, we discuss the implementation of a novel microelectromechanical-systems (MEMS)-based energy harvester (EH) concept within the technology platform available at the ISAS Institute (TU Vienna, Austria). The device, already presented by the authors, exploits the piezoelectric effect to convert environmental vibrations energy into electricity, and presents multiple resonant modes in the frequency range of interest (i.e. below 10 kHz). The experimental characterisation of a sputter deposited aluminium nitride piezoelectric thin-film layer is reported, leading to the extraction of material properties parameters. Such values are then incorporated in the finite element method model of the EH, implemented in Ansys Workbench (TM), in order to get reasonable estimates of the converted power levels achievable by the proposed device solution. Multiphysics simulations indicate that extracted power values in the range of several mu W can be addressed by the EH-MEMS concept when subjected to mechanical vibrations up to 10 kHz, operating in closed-loop conditions (i.e. piezoelectric generator connected to a 100 k Omega resistive load). This represents an encouraging result, opening up the floor to exploitations of the proposed EH-MEMS device in the field of wireless sensor networks and zero-power sensing nodes.
add ClaimPlease grant OpenAIRE to access and update your ORCID works.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.<script type="text/javascript"> <!-- document.write('<div id="oa_widget"></div>'); document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=10.1007/s00542-018-3923-1&type=result"></script>'); --> </script>For further information contact us at helpdesk@openaire.eu - E Serra;
M Bonaldi; M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; +2 Authors E Serra; M Bonaldi; M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; G Pandraud; PM Sarro;G Pandraud
Harvested from ORCID Public Data FileG Pandraud in OpenAIRESilicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed.
Access RoutesGreen gold 2 citations 2 popularity Average influence Average impulse Average 
Powered by BIP!add ClaimPlease grant OpenAIRE to access and update your ORCID works.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.<script type="text/javascript"> <!-- document.write('<div id="oa_widget"></div>'); document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=10.1016/j.proeng.2014.11.579&type=result"></script>'); --> </script>For further information contact us at helpdesk@openaire.eu
