E Serra; 
M Bonaldi; M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; +2 Authors E Serra; M Bonaldi; M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; G Pandraud; PM Sarro;G Pandraud
Harvested from ORCID Public Data FileG Pandraud in OpenAIRESilicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed.
Access RoutesGreen gold 2 citations 2 popularity Average influence Average impulse Average 
Powered by BIP!add ClaimPlease grant OpenAIRE to access and update your ORCID works.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.<script type="text/javascript"> <!-- document.write('<div id="oa_widget"></div>'); document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=10.1016/j.proeng.2014.11.579&type=result"></script>'); --> </script>For further information contact us at helpdesk@openaire.eu- E Serra; M Bonaldi;
M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; +2 Authors E Serra; M Bonaldi; M Bonaldi
Derived by OpenAIRE algorithms or harvested from 3rd party repositoriesM Bonaldi in OpenAIRE A Borrielli; A Borrielli
Harvested from ORCID Public Data FileA Borrielli in OpenAIRE L Conti; G Pandraud; PM Sarro;G Pandraud
Harvested from ORCID Public Data FileG Pandraud in OpenAIRESilicon resonators are widely used in a large class of applications including sensing and actuation, signal processing and energy harvesting. Very often, their application as sensors requires the deposition of metallic thin films or dielectric coatings, to set the electrical conductivity, the optical coupling, or other physical-chemical properties of the device. Invariably coatings degrade the quality factor (Q) of resonance by increasing the amount of energy dissipated during vibration. In this paper, we show a class of resonators used for the investigation of thermal noise statistical properties in non-thermodynamic equilibrium. Design strategies to preserve the silicon Q-factor are discussed.
Access RoutesGreen gold 2 citations 2 popularity Average influence Average impulse Average Powered by BIP!add ClaimPlease grant OpenAIRE to access and update your ORCID works.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.This Research product is the result of merged Research products in OpenAIRE.
You have already added works in your ORCID record related to the merged Research product.<script type="text/javascript"> <!-- document.write('<div id="oa_widget"></div>'); document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=10.1016/j.proeng.2014.11.579&type=result"></script>'); --> </script>For further information contact us at helpdesk@openaire.eu
