The goal of EnSO is to develop and consolidate a unique European ecosystem in the field of autonomous micro energy sources (AMES) supporting Electronic European industry to develop innovative products, in particular in IoT markets. In summary, EnSO multi-KET objectives are: • Objective 1: demonstrate the competitiveness of EnSO energy solutions of the targeted Smart Society, Smart Health, and Smart Energy key applications • Objective 2: disseminate EnSO energy solutions to foster the take-up of emerging markets. • Objective 3: develop high reliability assembly technologies of shapeable micro batteries, energy harvester and power management building blocks • Objective 4: Develop and demonstrate high density, low profile, shapeable, long life time, rechargeable micro battery product family. • Objective 5: develop customizable smart recharge and energy harvesting enabling technologies for Autonomous Micro Energy Source “AMES”. • Objective 6: demonstrate EnSO Pilot Line capability and investigate and assess the upscale of AMES manufacturing for competitive very high volume production. EnSO will bring to market innovative energy solutions inducing definitive differentiation to the electronic smart systems. Generic building block technologies will be customizable. EnSO manufacturing challenges will develop high throughput processes. The ENSo ecosystem will involve all the value chain from key materials and tools to many demonstrators in different fields of application. EnSO work scope addresses the market replication, demonstration and technological introduction activities of ECSEL Innovation Action work program. EnSO relates to several of the Strategic Thrusts of ECSEL MASP. EnSO innovations in terms of advanced materials, advanced equipment and multi-physics co-design of heterogeneous smart systems will contribute to the Semiconductor Process, Equipment and Materials thrust. The AMES will be a key enabling technology of Smart Energy key applications.

Smart-MEMPHIS project addresses the increasing demand for low-cost, energy-efficient autonomous systems by focusing on the main challenge for all smart devices - self-powering. The project aims to design, manufacture and test a miniaturized autonomous energy supply based on harvesting vibrational energy with piezo-MEMS energy harvesters. The project will integrate several multi-functional technologies and nanomaterials; lead-zirconate-titanate materials in MEMS-based multi-axis energy harvester, an ultra-low-power ASIC to manage the variations of the frequency and harvested power, a miniaturized carbon-nano material based energy storing supercapacitor, all heterogeneously integrated with new innovative flat panel packaging technologies for cost effective 3D integration verified through manufacturability reviews. The performance of the system will be demonstrated in two demanding applications: leadless bio-compatible cardiac pacemaker and wireless sensor networks (WSN) for structure health monitoring (SHM). For the pacemaker, a smart energy autonomous system will accelerate the paradigm shift from costly, burdensome surgical treatments to cost-effective and patient-friendly minimally invasive operations enabled by leadless pacemakers capable of harvesting energy from the heart beats. The key challenges for the energy harvesting arise from the extremely stringent reliability requirements, the low vibrational energies and frequencies and the small size required for a device implanted inside a heart. With the 2nd demonstrator the consortium consisting of multi-functional value chain will show a wider applicability for the technologies complementing the medical application. A WSN with acoustic sensor nodes will be demonstrated in SHM applications. SHM enables real-time monitoring of complex structures e.g. survey and detection of micro-cracks for example in composite aircraft wings, bridges or rails, or detection of corrosion or leakage in pipes solving.