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Atomic scale heating in energetic plasma deposition
Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.
- University of North Texas United States
- University of North Texas United States
- University of California System United States
Binding Energy, Physics, Sputtering, Activation Energy, Heating, Diffusion, Plasma physics and fusion, Kinetics, Plasma, Kinetic Energy, Potential Energy, Texture, 70 Plasma Physics And Fusion Technology, Electron Emission, Deposition
Binding Energy, Physics, Sputtering, Activation Energy, Heating, Diffusion, Plasma physics and fusion, Kinetics, Plasma, Kinetic Energy, Potential Energy, Texture, 70 Plasma Physics And Fusion Technology, Electron Emission, Deposition
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