
Found an issue? Give us feedback
Please grant OpenAIRE to access and update your ORCID works.
This Research product is the result of merged Research products in OpenAIRE.
You have already added 0 works in your ORCID record related to the merged Research product.
You have already added 0 works in your ORCID record related to the merged Research product.
This Research product is the result of merged Research products in OpenAIRE.
You have already added 0 works in your ORCID record related to the merged Research product.
You have already added 0 works in your ORCID record related to the merged Research product.
All Research products
<script type="text/javascript">
<!--
document.write('<div id="oa_widget"></div>');
document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=undefined&type=result"></script>');
-->
</script>
For further information contact us at helpdesk@openaire.eu
Anodic silicon etching; the formation of uniform arrays of macropores or nanowires

Authors: W. M. Weeda; R. J. G. Elfrink; J. E. A. M. van den Meerakker; Fred Roozeboom;
Abstract
Macropore formation on p‐type Si in the dark has been studied on 6‐inch wafers in aqueous HF solution. More than 109 pores with a diameter of 2.5 μm and a depth of 100 μm are obtained in a single etch step. These pores can be used as a template for the fabrication of high‐density MOS capacitors. If the current density is close to the characteristic peak for the anodic etching of Si in HF solutions, nanowires are obtained. The length of these wires can reach values up to 100 μm, while their width can be as small as 30 nm. This method is a suitable way to the high‐volume production of nanowires.
Country
Netherlands
Related Organizations
- Philips United Kingdom
- Vrije Universiteit Amsterdam Netherlands
- Free University of Amsterdam Pure VU Amsterdam Netherlands
- Philips United Kingdom
Keywords
SDG 6 - Clean Water and Sanitation
SDG 6 - Clean Water and Sanitation
citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).24 popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.Average influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).Top 10% impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.Average

Found an issue? Give us feedback
citations
Citations provided by BIP!
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
popularity
Popularity provided by BIP!
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
24
Average
Top 10%
Average
Fields of Science (3) View all
Related to Research communities
Energy Research