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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
phys stat sol (a)
Article . 2003 . Peer-reviewed
License: Wiley TDM
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Anodic silicon etching; the formation of uniform arrays of macropores or nanowires

Authors: W. M. Weeda; R. J. G. Elfrink; J. E. A. M. van den Meerakker; Fred Roozeboom;

Anodic silicon etching; the formation of uniform arrays of macropores or nanowires

Abstract

Macropore formation on p‐type Si in the dark has been studied on 6‐inch wafers in aqueous HF solution. More than 109 pores with a diameter of 2.5 μm and a depth of 100 μm are obtained in a single etch step. These pores can be used as a template for the fabrication of high‐density MOS capacitors. If the current density is close to the characteristic peak for the anodic etching of Si in HF solutions, nanowires are obtained. The length of these wires can reach values up to 100 μm, while their width can be as small as 30 nm. This method is a suitable way to the high‐volume production of nanowires.

Country
Netherlands
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Keywords

SDG 6 - Clean Water and Sanitation

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
24
Average
Top 10%
Average