The optimization of photovoltaic solar power plants location in Atacama Desert, Chile, is presented in this study. The study considers three objectives: (1) Find sites with the highest solar energy potential, (2) determine sites with the least impact on the environment, and (3) locate the areas which produce small social impact. To solve this task, multi-criteria decision analyses (MCDAs) such as analytical hierarchy process and ordered weighted averaging were applied in a GIS environment. In addition, survey results of social impacts were analyzed and included into the decision-making process, including landscape values. The most suitable sites for solar energy projects were found near roads and power lines throughout the study area. Large suitable areas were found also from central valley from Arica and Parinacota to the north edge of Atacama region. In Atacama region, most suitable sites were found in the Andes. On the contrary, Andes were also found to have high environmental values and scenically valuable landscapes. Moderate and low suitability were found on the coast, especially in Atacama region. Factors such as slope and distance to power lines and roads influenced largely the sensitivity analysis. Area of high suitability increased by 15% when distance to roads was excluded and 18% when distance to power lines or slope was removed. MCDA-GIS method was found to be useful and applicable to the optimization of solar power plant locations in northern Chile.