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Structural and optical characterization of size controlled silicon nanocrystals in SiO2/SiOxNy multilayers

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2011Publisher:Elsevier BVJournal:Energy Procedia, volume 10, pages 43-48 (issn: 1876-6102,

Authors: Daniel Hiller; Lluís López-Conesa; J. López-Vidrier; Sebastian Gutsch; Sònia Estradé; B. Garrido; Philipp Löper; +4 Authors

doi: 10.1016/j.egypro.2011.10.150

Structural and optical characterization of size controlled silicon nanocrystals in SiO2/SiOxNy multilayers

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Abstract

AbstractWe offer a complete structural and optical study of samples containing silicon nanocrystals (Si-NCs) embedded in SiO2/SiON multilayers, varying the oxynitride layer thickness from 2.5 to 7nm. Using energy-filtered transmission electron microscopy we have determined the size distribution of the precipitated Si-nanoaggregates. Raman scattering measurements were used to investigate the Si-NC size and crystalline quality. By combining both techniques, the nanoaggregate crystalline degree has been evaluated, with values around 50% for all the samples. Photoluminescence spectroscopy has shown a blueshift of the emission at smaller NC sizes, presenting the sample with Si-NCs of 3.9nm the best emission properties.

Related Organizations

University of Barcelona
Spain
University of Freiburg
Germany
University of Barcelona (UB)
Spain
Fraunhofer Society
Germany
Fraunhofer Institute for Solar Energy Systems
Germany

Keywords

Silicon Nanocrystals, EFTEM, Oxynitride, Energy(all), Raman Scattering, Photoluminescence

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