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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Electrochimica Actaarrow_drop_down
image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Electrochimica Acta
Article . 2016 . Peer-reviewed
License: Elsevier TDM
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Electrochimica Acta
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Micro-pattern Corrosion Screening on Bimetallic Corrosion for Microelectronic Application

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Aug 2016Publisher:Elsevier BVJournal:Electrochimica Acta, volume 210, pages 512-519 (issn: 0013-4686, Copyright policy )
Authors: Praveen Reddy Nalla; Simon Koskey; Sirish Rimal; Oliver Chyan; Kanwal Jit Singh; Kyle Yu; Satyarth Suri; +2 Authors

doi: 10.1016/j.electacta.2016.05.189

Micro-pattern Corrosion Screening on Bimetallic Corrosion for Microelectronic Application

Abstract

Abstract The continued miniaturization of the integrated circuit, leading to minute dimensions ( 12) at Cu/Ru interface, caused by enhanced oxygen reduction reaction on Ru, is proposed to generate more NH 3 for sustaining fast Cu corrosion. Effects of different plasma chemistries like CF 4 , CF 4 + O 2 , CH 2 F 2 , C 4 F 8 and SF 6 on the Cu corrosion in tetramethylammonium hydroxide (TMAH) were also investigated. Plasma treatments using higher fluorine content gases showed higher Cu corrosion rate in TMAH. Benzotriazole showed limited corrosion inhibition to plasma treated Cu/Ru micro-patterns in pH 14 TMAH solution. Contrastingly, pyrazole demonstrated as an effective corrosion inhibitor suppressing Cu corrosion rate down to the desirable

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
10
Top 10%
Average
Average
bronze