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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Solar Energy Materia...arrow_drop_down
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Solar Energy Materials and Solar Cells
Article . 2010 . Peer-reviewed
License: Elsevier TDM
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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
Utrecht University Repository
Article . 2010
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Solar Energy Materials and Solar Cells
Article . 2010
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Solar Energy Materials and Solar Cells
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Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Sep 2010 Netherlands Publisher:Elsevier BVJournal:Solar Energy Materials and Solar Cells, volume 94, pages 1,534-1,541 (issn: 0927-0248, Copyright policy )
Authors: Rath, J.K.; Brinza, M.; Liu, Y.; Borreman, A.; Schropp, R.E.I.;

doi: 10.1016/j.solmat.2010.01.013

Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD

Abstract

Thepaperdescribesthewaytotransferprocesstechnologyofstate-of-the-arthighefficiencythinfilm siliconsolarcellsfabricationoncheapplastic(suchasPETorPEN)substrates,bytwocompletelydifferent approaches:(i)bytransferprocess(Helianthosconcept)ofthinfilmsiliconcellsdepositedathigh substratetemperature, Ts ( 200 1C) and(ii)directdepositionontemperaturesensitivesubstratesatlow Ts ( 100 1C).Adaptationoftheprocessparametersandcellprocessingtotherequirementoftheflexible/ plasticsubstrateisthemostcrucialstep.In-situdiagnosisoftheplasmahasbeendonetounderstandthe effectofinter-electrodedistance,substratetemperatureandhydrogendilutiononthegasphase conditions.Whereas,forthetransferprocess,theinter-electrodedistanceisacriticaldepositioncondition thatneedstobeadaptedfortheflexiblesubstrates,thedirectdepositiononplasticsubstrateshasan addedissueoflossinmaterialqualityandthedepositionrateduetodepositionsatlow Ts. Ourstudies indicatethationenergyiscrucialforobtainingcompactfilmsatlowtemperatureandhighhydrogen dilutionhelpstocompensatethelossofionenergyatlowsubstratetemperatures.Efficienciesof 5.9% and6.2%havebeenobtainedforn–i–ptypea-SicellsonPETandPENsubstrates,respectively,usingdirect deposition.Usinganadaptedinter-electrodedistance,ana-Si/nc-Sitandemcellonplastic(polyester) substratewithanefficiencyof8.1%hasbeenmadebyHelianthoscelltransferprocess.

Country
Netherlands
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Keywords

Solar cell, Amorphous silicon, Plastic, Nanocrystalline silicon, Thin film, VHF PECVD

  • BIP!
    Impact byBIP!
    citations
    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 65
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    		 Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    		 Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    		 Top 10%
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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
65
Top 10%
Top 10%
Top 10%
Related to Research communities
Netherlands
SDSN Greece
Energy Research