Abstract ZnO/CdS/CIS solar cell structures have been made by using different deposition techniques for each layer: standard rf-magnetron sputtering and chemical bath deposition for ZnO and CdS, respectively, and direct electrodeposition for CIS as a low-cost alternative to the co-evaporated absorber. Chemical studies of ZnO, CdS and CIS films, ZnO–CdS and CdS–CIS bilayers, and ZnO–CdS–CIS cells have been performed by utilising XPS. No chemical reactions were detected in the interfaces. Photovoltaic quality was evaluated from the spectral response data.