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Nickel: A very fast diffuser in silicon

doi: 10.1063/1.4807799
Nickel: A very fast diffuser in silicon
Nickel is increasingly used in both IC and photovoltaic device fabrication, yet it has the potential to create highly recombination-active precipitates in silicon. For nearly three decades, the accepted nickel diffusivity in silicon has been DNi(T)=2.3×10−3exp(−0.47 eV/kBT) cm2/s, a surprisingly low value given reports of rapid nickel diffusion in industrial applications. In this paper, we employ modern experimental methods to measure the higher nickel diffusivity DNi(T)=(1.69±0.74)×10−4exp(−0.15±0.04 eV/kBT) cm2/s. The measured activation energy is close to that predicted by first-principles theory using the nudged-elastic-band method. Our measured diffusivity of nickel is higher than previously published values at temperatures below 1150 °C, and orders of magnitude higher when extrapolated to room temperature.
- Massachusetts Institute of Technology United States
- University of Konstanz Germany
- The University of Texas System United States
- Aalto University Finland
- AALTO-KORKEAKOULUSAATIO Finland
ta213, ta114, ab initio calculations, ta221, diffusion, extrapolation, silicon, nickel, ta318, elemental semiconductors, ta216, ta116
ta213, ta114, ab initio calculations, ta221, diffusion, extrapolation, silicon, nickel, ta318, elemental semiconductors, ta216, ta116
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