Energy harvesters withstanding high temperatures could provide potentially unlimited energy to sensor nodes placed in harsh environments, where manual maintenance is difficult and costly. Experimental results on a classical microcantilever show a 67% drop of the maximum power when the temperature is increased up to 160 °C. This decrease is investigated using a lumped-parameters model which takes into account variations in material parameters with temperature, damping increase and thermal stresses induced by mismatched thermal coefficients in a composite cantilever. The model allows a description of the maximum power evolution as a function of temperature and input acceleration. Simulation results further show that an increase in damping and the apparition of thermal stresses are contributing to the power drop at 59% and 13% respectively.