High-quality single layer and bilayer diamond-like carbon (DLC) thin films are fabricated by two technologies, namely, ion-assisted plasma-enhanced deposition (IAPED) and electron cyclotron resonance (ECR) deposition. Deposition on various substrates such as sapphires and solar cells has been performed at low substrate temperatures (50/spl deg//spl sim/80/spl deg/C). The two deposition technologies allow good control over the growth conditions to produce DLC films with desired optical properties, thickness, and energy bandgap. The bilayer structured DLC can be fabricated by using IAPED for the bottom layer followed by ECR for the top layer, or just by IAPED for both layers with different compositions. The DLC films have shown good spatial uniformity, density, microhardness, and adhesion strength. They exhibit excellent stability against attack by strong acids, prolonged damp-heat exposure at 85 /spl deg/C and 85% relative humidity, mechanical scratch, ultrasonication, and irradiation by ultraviolet (UV), protons, and electrons. When deposited on crystalline Si and GaAs solar cells in single layer and/or bilayer structure, the DLC films not only serve as antireflection coating and protective encapsulant, but also improve the cell efficiencies.