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Article . 2004
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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao
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Article . 2004
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Electrochemical and Solid-State Letters
Article . 2004 . Peer-reviewed
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Electrochemical and Solid-State Letters
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Electroacoustic Measurements on Electrodeposited Films Obtained from Copper Damascene Process Chemistries

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Jan 2004 France Publisher:The Electrochemical SocietyJournal:Electrochemical and Solid-State Letters, volume 7, page C52 (issn: 1099-0062, Copyright policy )
Authors: Gabrielli, Claude; Mocoteguy, Philippe; Perrot, Hubert; Zdunek, A.; Bouard, P.; Haddix, M.;

doi: 10.1149/1.1649699

Electroacoustic Measurements on Electrodeposited Films Obtained from Copper Damascene Process Chemistries

Abstract

Electroacoustic admittance measurements were performed on copper bath solutions containing additives that are used in the copper damascene process. Preliminary results have shown that an electroacoustic admittance parameter can be defined that varies with additive concentration. It is proposed that quartz resonators may be suitable sensors for monitoring copper bath additives.

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France
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[CHIM] Chemical Sciences

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
5
Average
Average
Average
Related to Research communities
Energy Research