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Electroacoustic Measurements on Electrodeposited Films Obtained from Copper Damascene Process Chemistries

Authors: Gabrielli, Claude; Mocoteguy, Philippe; Perrot, Hubert; Zdunek, A.; Bouard, P.; Haddix, M.;
doi: 10.1149/1.1649699
Abstract
Electroacoustic admittance measurements were performed on copper bath solutions containing additives that are used in the copper damascene process. Preliminary results have shown that an electroacoustic admittance parameter can be defined that varies with additive concentration. It is proposed that quartz resonators may be suitable sensors for monitoring copper bath additives.
Country
France
Related Organizations
- Sorbonne University France
- Sorbonne Paris Cité France
- Laboratoire d'informatique de Paris 6 France
Keywords
[CHIM] Chemical Sciences
[CHIM] Chemical Sciences
citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).5 popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.Average influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).Average impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.Average

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citations
Citations provided by BIP!
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
popularity
Popularity provided by BIP!
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
5
Average
Average
Average
Fields of Science (3) View all
Related to Research communities
Energy Research