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<script type="text/javascript">
<!--
document.write('<div id="oa_widget"></div>');
document.write('<script type="text/javascript" src="https://beta.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=undefined&type=result"></script>');
-->
</script>
A Model for Copper Deposition in the Damascene Process

Abstract Copper deposition in a plating bath known to fill narrow trenches was studied on a rotating disc electrode by impedance measurements. The chemistry of this bath contained, in addition to sulphuric acid, copper sulphate and chloride ions, polyethylene glycol (PEG) as an inhibitor and 3-mercapto-1-propanesulfonate, sodium salt (MPSA) as an accelerator. The experimental results were compared with a model taking into account these organic additives. A competitive adsorption of two complexes: PEG–Cl–CuI and CuISPS formed from Cu+ and the additives, is proposed. A good agreement was shown between this model and the experiments on fresh plating bathes.
- Centre de Génétique Moléculaire France
- Air Liquide United Kingdom
- Centre national de la recherche scientifique France
- Centre de Génétique Moléculaire France
- IE University Spain
Copper; PEG; MPSA; Damascene process; Copper deposition; Organic additives, [CHIM] Chemical Sciences, Damascene process; EIS
Copper; PEG; MPSA; Damascene process; Copper deposition; Organic additives, [CHIM] Chemical Sciences, Damascene process; EIS
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