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Achieving Extreme Etching Rates by Overcoming Silicon Passivity

Authors: T. Zaid; D. Starosvetsky; IRACE, ANDREA; DE LAURENTIS, MARTINA; Y. Ein Elia;
doi: 10.1149/1.3358141
handle: 11588/364503
Abstract
Ultrarapid anodic dissolution of silicon in HF-free solutions is reported. Although the etch rates are insignificant up to a potential of 25 V, when shifting the potential to higher values of 35―55 V the silicon etch rate reached a record value of more than 30 μm/min. In addition, surface morphologies are notably affected by the applied potential, modifying the surface from a porous one to a partially polished one.
Country
Italy
Related Organizations
Keywords
polishing, silicon etching; texturing; polishing, silicon etching, texturing
polishing, silicon etching; texturing; polishing, silicon etching, texturing
citations This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).1 popularity This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.Average influence This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).Average impulse This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.Average

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citations
Citations provided by BIP!
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
popularity
Popularity provided by BIP!
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
1
Average
Average
Average
Fields of Science (3) View all
Related to Research communities
Energy Research