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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Archivio della ricer...arrow_drop_down
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Electrochemical and Solid-State Letters
Article . 2010 . Peer-reviewed
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Achieving Extreme Etching Rates by Overcoming Silicon Passivity

Authors: T. Zaid; D. Starosvetsky; IRACE, ANDREA; DE LAURENTIS, MARTINA; Y. Ein Elia;

Achieving Extreme Etching Rates by Overcoming Silicon Passivity

Abstract

Ultrarapid anodic dissolution of silicon in HF-free solutions is reported. Although the etch rates are insignificant up to a potential of 25 V, when shifting the potential to higher values of 35―55 V the silicon etch rate reached a record value of more than 30 μm/min. In addition, surface morphologies are notably affected by the applied potential, modifying the surface from a porous one to a partially polished one.

Country
Italy
Keywords

polishing, silicon etching; texturing; polishing, silicon etching, texturing

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
1
Average
Average
Average