ABSTRACTElectrode materials for solid-oxide fuel cells are developed using sputter deposition. A thin film anode is formed by co-deposition of nickel and yttria-stabilized zirconia. This approach is suitable for composition grading and the provision of a mixed-conducting interfacial layer to the electrolyte layer. Similarly, synthesis of a thin film cathode proceeds by co-deposition of silver and yttria-stabilized zirconia. The sputter deposition of a thin film solid-oxide fuel cell is next demonstrated. The thin film fuel cell microstructure is examined using scanning electron microscopy whereas the cell perfomance is characterized through current-voltage measurement and corresponding impedance spectroscopy.