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Impact of Metallization Techniques on Surface Passivation of High Efficiency Crystalline Silicon Solar Cells

Authors: Coll Valentí, Arnau; Martín García, Isidro; Ortega Villasclaras, Pablo Rafael; Bermejo Broto, Sandra; López, Gema; Alcubilla González, Ramón;

Impact of Metallization Techniques on Surface Passivation of High Efficiency Crystalline Silicon Solar Cells

Abstract

Most of the high-efficiency c-Si solar cells are based on dielectric films that electrically passivate c-Si surface and must keep their passivation properties after metal deposition on top of them. This work studies the impact of three different aluminum Physical Vapor Deposition (PVD) methods (thermal, e-beam, sputtering) on the c-Si surface passivation provided by SiO2 and Al2O3 films. Effective surface recombination velocity is measured before and after metal deposition. Results show that e-beam and sputtering techniques degrade surface passivation while thermal evaporation has no impact. Surface passivation can be recovered and even improved by means of an annealing with the aluminum film on top of the dielectric leading to the so-called alnealing. Additionally, after this alnealing Capacitance-Voltage measurements and lifetime spectroscopy analysis suggest a strong dependence of fixed charge density for SiO2 films on the metal deposition technique that helps in c-Si surface passivation.

28th European Photovoltaic Solar Energy Conference and Exhibition; 1213-1216

Country
Spain
Keywords

Solar cells, c-Si surface passivation, Àrees temàtiques de la UPC::Energies::Energia solar fotovoltaica::Cèl·lules solars, :Energies::Energia solar fotovoltaica::Cèl·lules solars [Àrees temàtiques de la UPC], Post Metallization Annealing, Silicon Solar Cell Improvements, WAFER-BASED SILICON SOLAR CELLS AND MATERIALS TECHNOLOGY, Solar energy, Energia solar, Cèl·lules solars

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visibility
citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
views
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3
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