In the current study, the influence of heating rates between 1 and 50 °C s−1 on the response of TL glow peaks of CaF2 : Dy (TLD-200) has been investigated using a computer glow curve deconvolution (CGCD) method before and after application of the thermal cleaning method at 90 and 170 °C. The trapping parameters of the main glow peaks were also obtained using the CGCD method as a function of heating rate. The results showed that the peak temperatures of all glow peaks increase with increasing heating rates. The peak height method showed that the peak value (Im) in the glow curve below 230 °C is approximately constant for low heating rates up to 10 °C s−1, but slightly increased after that by about 10% with increasing heating rate. The integrated total area of low temperature peaks below 230 °C is more stable. It remains constant for heating rates less than 25 °C s−1, then it slowly increases by about 10% with increasing heating rate up to 50 °C s−1. The increase in the total area of low temperature peaks is reduced after the application of the thermal cleaning method. The peak intensities and total area of high temperature peaks above 260 °C decrease continuously with increasing heating rate in the investigated region of heating rates.