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image/svg+xml Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Closed Access logo, derived from PLoS Open Access logo. This version with transparent background. http://commons.wikimedia.org/wiki/File:Closed_Access_logo_transparent.svg Jakob Voss, based on art designer at PLoS, modified by Wikipedia users Nina and Beao Advanced Materials R...arrow_drop_down
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Advanced Materials Research
Article . 2011 . Peer-reviewed
License: Trans Tech Publications Copyright and Content Usage Policy
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Preparation and its Silica Wafer CMP Performance of Cationic Polyelectrolyte Modified Benzoguanamine Formaldehyde/SiO<sub>2</sub> Composite Abrasives Slurry

descriptionPublicationkeyboard_double_arrow_right Article , Journal 01 Feb 2011Publisher:Trans Tech Publications, Ltd.Journal:Advanced Materials Research, volume 189-193, pages 4,158-4,162 (eissn: 1662-8985, Copyright policy )
Authors: Bin Shan Zhao; Xue Feng Xu; Quan Guo; Yu Zhi Yang; Wei Peng;

doi: 10.4028/www.scientific.net/amr.189-193.4158

Preparation and its Silica Wafer CMP Performance of Cationic Polyelectrolyte Modified Benzoguanamine Formaldehyde/SiO<sub>2</sub> Composite Abrasives Slurry

Abstract

In this paper, the adsorption characteristics of cationic polyelectrolyte PDADMAC on BGF particles and Zeta potential of BGF particles have been investigated. A new type of composite abrasive slurry was obtained with cationic polyelectrolyte modified BGF particles and its polishing performance was studied. Experimental results showed that the Zeta potential of the modified BGF particles was changed from negative to positive and the maximum value (+35mv) was obtained when the adsorption saturation was achieved, and the adsorption capacity of SiO2 abrasives on BGF particles was improved significantly as well. The material removal rate was 469nm/min with the modified BGF/ SiO2 composite abrasives slurry containing 5% SiO2 and 3% modified BGF particles, increasing by 47% and 89% than those of the unmodified BGF/SiO2 composite abrasives slurry (319nm/min) and the single silica abrasives slurry (248nm/min), respectively.

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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
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Average
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