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Wafer-Scale Production of Uniform InAsyP1–y Nanowire Array on Silicon for Heterogeneous Integration

Authors: Xiuling Li; Lan Yu; Kyoung Jin Choi; Hyo-Jin Kim; Ari Lee; Won Jun Choi; Jae Hun Kim; +5 Authors

Wafer-Scale Production of Uniform InAsyP1–y Nanowire Array on Silicon for Heterogeneous Integration

Abstract

One-dimensional crystal growth allows the epitaxial integration of compound semiconductors on silicon (Si), as the large lattice-mismatch strain arising from heterointerfaces can be laterally relieved. Here, we report the direct heteroepitaxial growth of a mixed anion ternary InAsyP1-y nanowire array across an entire 2 in. Si wafer with unprecedented spatial, structural, and special uniformity across the entire 2 in. wafer and dramatic improvements in aspect ratio (>100) and area density (>5 × 10(8)/cm(2)). Heterojunction solar cells consisting of n-type InAsyP1-y (y = 0.75) and p-type Si achieve a conversion efficiency of 3.6% under air mass 1.5 illumination. This work demonstrates the potential for large-scale production of these nanowires for heterogeneous integration of optoelectronic devices.

Country
Korea (Republic of)
Keywords

One-dimensional crystals, Heterogeneous integration, Hetero-interfaces, Large-scale production, Compound semiconductors, InAs, II-IV semiconductors, Heterojunction solar cells

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    64
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    Top 10%
    influence
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Found an issue? Give us feedback
citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
64
Top 10%
Top 10%
Top 1%