Abstract ZnOrod/In2S3/CuInS2 type ETA-cells were prepared by in-line chemical spray pyrolysis method. Effects of buffer layer thickness and ZnO nanorod length (500–1000 nm) were studied by means of SEM, I–V dependencies and EQE spectra. Conformal layer of In2S3, obtained by spray of solution with pH=4.8, effectively protects ZnO nanorods from dissolution during the spray of acidic solutions. Increasing In2S3 layer thickness reduces fluctuations of the cell output parameters, and increases VOC and FF; however, at certain thickness induces losses due to light absorption. The highest conversion efficiency 4.17% at AM1.5 was recorded from small contact area of the cell based on rods with length of 600 nm. Perspectives for further development are discussed.