Abstract The tracks of oxygen transport around platinum or gold electrode/yttria stabilized zirconia (YSZ) electrolyte interface were visualized by oxygen isotope (18O) labeling (T = 773–973 K, p(O2) = 7 kPa, cathodic polarization E = 0 or − 0.3 V) and multi dimensional imaging using secondary ion mass spectrometry (SIMS). The activation of oxygen exchange reaction was clearly observed as a strong 18O− intensity at metal/YSZ interface treated at T = 973 K indicating that the reaction dominantly occurs at gas/electrode/electrolyte triple phase boundary (TPB). Platinum/YSZ interface exhibited a stronger 18O− intensity than gold/YSZ, however, the intensity distribution was not homogenous. The effect of applying cathodic polarization on the oxygen transport was more clearly observed at gold/YSZ interface than platinum/YSZ. The cause of differences in experimental results is discussed in connection with the different reaction controlling process among the two electrodes materials.