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Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet’s Doubler as Conditioning Circuit

Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet’s Doubler as Conditioning Circuit
This letter presents for the first time experiments combining a previously reported microelectromechanical system electrostatic vibration energy harvester (e-VEH) and the Bennet’s doubler circuit. A self-limiting effect on the harvested power, which was not reported before on macroscopic e-VEHs, has been observed. This effect is due to the nonlinear dynamics of the system and to the self-increase of the electromechanical damping that is typical for e-VEHs. With a few volts of initial precharge, the Bennet’s doubler progressively increases the voltage across the transducer’s terminals up to 23 V, where saturation occurs. A power of 2.3 $\mu $ W is available for a load, when the harvester is excited by 1.5 g at 150 Hz of external acceleration.
Energy harvesting, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ]Engineering Sciences [physics]/Electric power, electrostatic transduction, [SPI.TRON] Engineering Sciences [physics]/Electronics, [SPI.TRON]Engineering Sciences [physics]/Electronics, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, MEMS, [ SPI.NRJ ] Engineering Sciences [physics]/Electric power, Bennet's doubler, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power
Energy harvesting, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ]Engineering Sciences [physics]/Electric power, electrostatic transduction, [SPI.TRON] Engineering Sciences [physics]/Electronics, [SPI.TRON]Engineering Sciences [physics]/Electronics, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, MEMS, [ SPI.NRJ ] Engineering Sciences [physics]/Electric power, Bennet's doubler, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power
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