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Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet’s Doubler as Conditioning Circuit

Authors: Dorzhiev, Vitaly; Karami, Armine; Basset, Philippe; Marty, Frédéric; Dragunov, Valery; Galayko, Dimitri;

Electret-Free Micromachined Silicon Electrostatic Vibration Energy Harvester With the Bennet’s Doubler as Conditioning Circuit

Abstract

This letter presents for the first time experiments combining a previously reported microelectromechanical system electrostatic vibration energy harvester (e-VEH) and the Bennet’s doubler circuit. A self-limiting effect on the harvested power, which was not reported before on macroscopic e-VEHs, has been observed. This effect is due to the nonlinear dynamics of the system and to the self-increase of the electromechanical damping that is typical for e-VEHs. With a few volts of initial precharge, the Bennet’s doubler progressively increases the voltage across the transducer’s terminals up to 23 V, where saturation occurs. A power of 2.3 $\mu $ W is available for a load, when the harvester is excited by 1.5 g at 150 Hz of external acceleration.

Country
France
Keywords

Energy harvesting, [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ]Engineering Sciences [physics]/Electric power, electrostatic transduction, [SPI.TRON] Engineering Sciences [physics]/Electronics, [SPI.TRON]Engineering Sciences [physics]/Electronics, [ SPI.TRON ] Engineering Sciences [physics]/Electronics, MEMS, [ SPI.NRJ ] Engineering Sciences [physics]/Electric power, Bennet's doubler, [ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NRJ] Engineering Sciences [physics]/Electric power

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    This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    61
    popularity
    This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
    Top 10%
    influence
    This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
    Top 10%
    impulse
    This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
    Top 1%
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citations
This is an alternative to the "Influence" indicator, which also reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Citations provided by BIP!
popularity
This indicator reflects the "current" impact/attention (the "hype") of an article in the research community at large, based on the underlying citation network.
BIP!Popularity provided by BIP!
influence
This indicator reflects the overall/total impact of an article in the research community at large, based on the underlying citation network (diachronically).
BIP!Influence provided by BIP!
impulse
This indicator reflects the initial momentum of an article directly after its publication, based on the underlying citation network.
BIP!Impulse provided by BIP!
61
Top 10%
Top 10%
Top 1%
Green
bronze
Related to Research communities
Energy Research