Mass finishing processes have widely industrial application, and in most conditions these processes are used with empiricism and trial and error. Based on basic concept of mass finishing, its category is presented. Main aspects of motion and force analysis, material removal model, equipment and consumables, process experiments and industrial application are induced. Finally, development trends are recommended from quantified models, process database, new mass finishing processes and surface integrity. This will provide full investigation and further development and research to improvement part surface integrity.